Comments on: Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture

Comments on: Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture https://www.efecon.tuiasi.ro/research-article/synthesis-of-highly-transparent-sicxnyozh-films-via-plasma-chemical-decomposition-of-113355-hexamethylcyclotrisilazane-oxygen-and-nitrogen-gas-mixture/ EFECON Sun, 22 May 2022 17:44:31 +0000 hourly 1 https://wordpress.org/?v=6.1.1